Application: semiconductor wafer handling; applicable wafer size: 300 ~ 450 mm; cleanliness: ISO grade 1
A semiconductor wafer handling robot;
Dynamic range: 1215mm
Control cabinet: SR100
Uses: handling, semiconductors
Large movement range: EFEM module moves up to 4 sets of application equipment, without the use of chassis, greatly improving the handling efficiency.
High-speed handling: 300 / hour
Applicable: 300mm-450mm wafer handling
* 1: The company's standard end effector (300mm: edge grip / vacuum suction, 450mm: vacuum suction)
* 2: 300mm crystal (SEMI standard standard), when using the company's standard 300mm corresponding terminal calibrator
* 3: Manipulator swing center position ~ Crystal center position (When the standard 300mm is corresponding to the end effector)
* 4: Crystal size based on SEMI specifications. Special quartz crystal please contact with us. Quartz crystal can also correspond (with performance). However, according to the quartz specification, the company needs to be evaluated and adjusted.
* 5: At a flow rate of 0.3 m / s, the robot arm is vacuum-adsorbed
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